TECHNICAL ALLIANCE BRIDGE
Areas
of Expertise:
Professional
Experience Highlights:
Professional
History:
Worked as a systems and design engineer for a total of over 23 years.
Independent consultant since 2004. Clients have included: Timbre Technologies
Inc., Owens Design, KLA-Tencor Corp., Bodkin Design and Engineering, Occumetrics
Inc., Invarium Inc., Soliacx, Silicon Valley Instruments, American Holt Corp.
5 years at Sensys Instruments/ Thermawave Corp. working on a
scatterometer product line.
11 years at Prometrix /Tencor /KLA-Tencor working on thin-film
measurement equipment
1 year at StepperVision, Inc. working on stepper overlay and
focus set-up instruments.
4 years at Perkin-Elmer Corp. working on stepper characterization
and systems engineering.
Education:
Patents
and Publications:
Adam
Norton
Lens and optical system design.
Semiconductor metrology.
Optical instrument design.
Designed and characterized optical subsystems for wafer steppers.
Designed optics for leading semiconductor thin-film measurement product
line.
Designed optics for semiconductor critical dimension measuring scatterometer.
Designed visible and infrared hyperspectral imagers.
B.A. Physics and Mathematics, 1983, Amherst College.
22 U.S. patents granted.
2 professional papers.
Norton
Engineered Optics
Member
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